tei Solutions offers 150mm tools for innovators and developers to utilize.

150mm Toolset Features

  • 0.5um Baseline
  • Aluminium BEOL
  • i-Line Stepper

150mm Toolset

*Tools are capable of operating outside standard operating parameters. Please contact tei Solutions for more information.  

Lithography

Equipment
i-Line Stepper
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Etch

Equipment
Asher
Al Etcher
Metal Etcher
Poly Etcher SiN Etcher SiO Etcher
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CVD

Equipment
Poly-Si
SiN
TEOS
PSG
P-SiO
P-SiN
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Anneal

Equipment
Horizontal Furnace
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Metals

Equipment
Sputter Al, WSi
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Wet Cleans

Equipment
Pre-Cleaning
HF
Organic
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