tei Solutions offers 300mm tools for innovators and developers to utilize.

300mm Toolset Features

  • 65nm CMOS Baseline
  • Poly Si/SiON Gate Stack
  • Three Layer Cu & Low-K
  • Immersion Lithography
  • ELK
  • High-K Metal Gate

300mm Toolset

*Tools are capable of operating outside standard operating parameters. Please contact tei Solutions for more information.  

Lithography

Equipment
ArF Immersion-Scanner
ArF Scanner
KrF Scanner
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Etch

Equipment
Oxide Etcher for Diffusion
Poly  Etcher
Oxide Etcher for Metal
Metal Etcher
Oxide Etcher for Cu
Low-k Etcher
Oxide Asher
Metal Asher
Low-k Asher
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CVD

Equipment
LP-SiN
HDP-SiO
Poly-Si, a-Poly
LP-TEOS
P-TEOS
P-SiC P-SiN P-SiO P-SiOC
Low-k
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Diffusion & Implant

Equipment
Oxidation
Anneal
RTO/RTP
Implantation
Implantation(High Current)
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Metals

Equipment
CVD W, Ti, TiN
Sputter Al, Ti
Seed-sputter
Cu-Plating
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CMP

Equipment
CMP-Ox
CMP-W
CMP-Cu
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Wet Cleans

Equipment
Resist Strip
Wet Etch Oxide
Wet Etch SiN
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