tei Solutions provides 100mm tools for innovators and developers to utilize.
100mm Toolset Features
- Aluminum BEOL
- E-Beam Lithography
- Alternative Substrates
- High-K gate dielectric
- (HfO, TiO2, Alumina)
- Metal gate (TiN, W)
100mm Toolset
*Tools are capable of operating outside standard operating parameters. Please contact tei Solutions for more information.
Lithography
| Equipment |
| i-line stepper |
| electron beam lithography |
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Etch
| Equipment |
| Asher |
| Al etcher |
| Metal etcher |
| ICP etcher (SiO2, Ge) |
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CVD
| Equipment |
| Poly-Si |
| SiN |
| TEOS |
| High-k |
| LTO |
| SiN-ALD |
| SiC , MoCVD |
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Diffusion
| Equipment |
| Horizontal furnace |
| RTA |
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Metals
| Equipment |
| Sputter for High-k/metal |
| Ni, AlSiCu/TiN sputtering system |
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Wet Cleans
| Equipment |
| Pre-Cleaning |
| HF |
| Organic |
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