tei Solutions provides 100mm tools for innovators and developers to utilize.

100mm Toolset Features

  • Aluminum BEOL
  • E-Beam Lithography
  • Alternative Substrates
  • High-K gate dielectric
  • (HfO, TiO2, Alumina)
  • Metal gate (TiN, W)

100mm Toolset

*Tools are capable of operating outside standard operating parameters. Please contact tei Solutions for more information.

Lithography

Equipment
i-line stepper
electron beam lithography
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Etch

Equipment
Asher
Al etcher
Metal etcher
ICP etcher (SiO2, Ge)
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CVD

Equipment
Poly-Si
SiN
TEOS
High-k
LTO
SiN-ALD
SiC , MoCVD
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Diffusion

Equipment
Horizontal furnace
RTA
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Metals

Equipment
Sputter for High-k/metal
Ni, AlSiCu/TiN sputtering system
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Wet Cleans

Equipment
Pre-Cleaning
HF
Organic
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