tei soltions

tei Solutions offers 150mm tools for innovators and developers to utilize.

150mm Toolset Features

• 0.5um Baseline
• Aluminium BEOL
• i-Line Stepper

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150mm Toolset

• Lithography
• Etch
• CVD
• Anneal
• Metals
• Wet Cleans

*Tools are capable of operating outside standard operating parameters. Please contact tei Solutions for more information.  

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Lithography

Equipment

i-Line Stepper

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Etch

Equipment

Asher

Al Etcher

Metal Etcher

Poly Etcher SiN Etcher SiO Etcher

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CVD

Equipment

Poly-Si

SiN

TEOS

PSG

P-SiO

P-SiN

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Anneal

Equipment

Horizontal Furnace

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Metals

Equipment

Sputter Al, WSi

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Wet Cleans

Equipment

Pre-Cleaning

HF

Organic

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