tei Solutions offers 200mm tools for innovators and developers to utilize.

200mm Toolset Features

  • 180nm Baseline
  • Aluminium BEOL
  • KrF Stepper
  • i-Line Stepper
  • SiGe Epi
  • In-situ Doped Poly Si
  • High Aspect Ratio Si Hole
  • Deep Si Etch

200mm Toolset

*Tools are capable of operating outside standard operating parameters. Please contact tei Solutions for more information.

Lithography

Equipment
KrF Stepper
i-Line Stepper
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Etch

Equipment
Asher
Al Etcher
Metal Etcher
Poly Etcher SiN Etcher SiO Etcher
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CVD

Equipment
Poly-Si
SiN
TEOS
BPSG
SiGe
P-SiO
P-SiN
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Anneal

Equipment
Horizontal Furnace
RTA, No Treatment
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Metals

Equipment
Sputter TiN, W, Al, Co, Ti, TaN, Cu
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Wet Cleans

Equipment
Pre-Cleaning
HF
Organic
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