300mm Toolset Features
- 65nm CMOS Baseline
- Poly Si/SiON Gate Stack
- Three Layer Cu & Low-K
- Immersion Lithography
- ELK
- High-K Metal Gate
300mm Toolset
*Tools are capable of operating outside standard operating parameters. Please contact tei Solutions for more information.Lithography
Equipment |
ArF Immersion-Scanner |
ArF Scanner |
KrF Scanner |
Etch
Equipment |
Oxide Etcher for Diffusion |
Poly Etcher |
Oxide Etcher for Metal |
Metal Etcher |
Oxide Etcher for Cu |
Low-k Etcher |
Oxide Asher |
Metal Asher |
Low-k Asher |
CVD
Equipment |
LP-SiN |
HDP-SiO |
Poly-Si, a-Poly |
LP-TEOS |
P-TEOS |
P-SiC P-SiN P-SiO P-SiOC |
Low-k |
Diffusion & Implant
Equipment |
Oxidation |
Anneal |
RTO/RTP |
Implantation |
Implantation(High Current) |
Metals
Equipment |
CVD W, Ti, TiN |
Sputter Al, Ti |
Seed-sputter |
Cu-Plating |
CMP
Equipment |
CMP-Ox |
CMP-W |
CMP-Cu |
Wet Cleans
Equipment |
Resist Strip |
Wet Etch Oxide |
Wet Etch SiN |