Si L/S Etch - Line=50nm, Depth=1000nm
Si Substrate Etching.
(Top)L/S=50/90nm, Pitch=140nm
Depth=1000nm(1um)
X-SEM
Si L/S Etch - Line=50nm, Depth=1000nm
Si Substrate Etching.
(Top)L/S=50/90nm, Pitch=140nm
Depth=1000nm(1um)
X-SEM
Si L/S Etch - Line=50nm, Depth=1000nm
Si Substrate Etching.
(Top)L/S=50/90nm, Pitch=140nm
Depth=1000nm(1um)
X-SEM