Si Hole Etch - φ120nm, Depth=1200nm
Si Substrate Etching.
(Top)Hole=φ120nm
Depth=1200nm(1.2um)
X-SEM
Si Hole Etch - φ120nm, Depth=1200nm
Si Substrate Etching.
(Top)Hole=φ120nm
Depth=1200nm(1.2um)
X-SEM
Si Hole Etch - φ120nm, Depth=1200nm
Si Substrate Etching.
(Top)Hole=φ120nm
Depth=1200nm(1.2um)
X-SEM