SiO L/S Etch - Space=120nm, Depth=2700nm
SiO film Etching.
(Top)L/S=180/120nm, Pitch=300nm
Depth=2700nm(2.7um)
X-SEM
SiO L/S Etch - Space=120nm, Depth=2700nm
SiO film Etching.
(Top)L/S=180/120nm, Pitch=300nm
Depth=2700nm(2.7um)
X-SEM
SiO L/S Etch - Space=120nm, Depth=2700nm
SiO film Etching.
(Top)L/S=180/120nm, Pitch=300nm
Depth=2700nm(2.7um)
X-SEM